SEMICONDUCTOR DEVICE WITH TEST ELECTRICAL GROUP PATTERN

摘要

PURPOSE: A semiconductor device is provided to prevent generation of particles in a lower electrode by using a line type TEG(Test Electrical Group) pattern. CONSTITUTION: A storage node(24) is arranged to cross the cell gates and spaced apart from cell gates(21). A gate node(21) is connected to the cell gates. A TEG pattern(28) is connected to the storage node. At this time, the TEG pattern(28) has a line shape having constant width. Preferably, the line-width of the TEG pattern(28) is 0.5 micrometer below.