APPARATUS FOR CORRECTING POSITION OF PZT MICRO ACTUATOR USING SHAPE MEMORY ALLOY THIN FILM

摘要

PURPOSE: An apparatus for correcting a position of a PZT micro actuator is provided to precisely correct the position of the PZT micro actuator by using a shape memory allow thin film. CONSTITUTION: An apparatus for correcting a position of a PZT micro actuator includes a laser sensor(14) for detecting a deformation distance of a bimorph-type PZT micro actuator(11). A detecting value of the laser sensor(14) is inputted into a sensor controller(30). A comparator(31) sends a current command to a current source(32) by receiving a detecting value and a predetermined value from a control unit(33) of the sensor controller(30). Upon receiving the current command from the comparator(31), the current source(32) applies current to an SMA thin film(34), which is deposited on the bimorph-type PZT micro actuator(11).