THIN FILM FORMING APPARATUS AND THIN FILM FORMING METHOD

摘要

PURPOSE: To provide a thin film forming apparatus which alternately supplies gaseous raw materials and can rapidly switch the supply of the gaseous raw materials and a method for the same. CONSTITUTION: When diaphragm energizing mechanisms 86-a and 86-b energize a diaphragm valve 83 to a casing side, a supply side aperture 92 of a supply line 91 for TiCl4 which is disposed in the upper face of a projecting part 85 and is connected to a supply line 21 of N2 is completely and directly shut off.