Skimmer for mass spectrometry

摘要

The present invention relates to a method and apparatus for a mass spectrometer. The skimmer of the present invention has a surface to reduce the overall interaction and deposition of unwanted compounds. The surface of the skimmer may be formed from an inorganic conductive nitride or may be applied to a substrate as a coating. The invention also includes a method for reducing the interaction or deposition of compounds on a mass spectrometer skimmer by application or coating the skimmer with an inert conductive material.