| 摘要 |
PURPOSE: A system for transporting a substrate carrier is provided to improve operation efficiency by unloading and loading the substrate carriers without stopping a conveyor. CONSTITUTION: A conveyor(12) transports a plurality of substrate carriers(14). The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor(12). A load and/or unload mechanism(32) lifts the substrate carriers(14) from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor.
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