METHOD FOR FABRICATING BRIDGE SENSOR USING EXCHANGE BIAS TYPE SPIN VALVE

摘要

PURPOSE: A method for fabricating a bridge sensor using an exchange bias type spin valve is provided to obtain the full-bridge characteristic by controlling differently variations of resistance direction of four resistors on one substrate. CONSTITUTION: A mask pattern is formed on a predetermined region of a flat substrate. A photoresist layer is formed thereon. The first spin valve layer is deposited on a predetermined region for forming two resistor elements having the same spinning direction. The photoresist layer is removed therefrom. A mask pattern is formed on the first spin valve layer. A photoresist layer is formed thereon. The second spin valve layer is deposited on a predetermined region for forming two resistor elements having the same spinning direction. The photoresist layer is removed therefrom. A mask for four resistor element patterns is formed and an etch process for the mask is performed. A wiring forming process is performed to form contact lines of four resistor elements.