| 摘要 |
PURPOSE: A grating light-value apparatus is provided to be capable of performing a high-speed driving operation at a lower voltage. CONSTITUTION: The first ribbon(30), the second ribbon(40) and the third ribbon(50) are formed over a substrate(10) with those spaced apart from the substrate(10). Planar electrodes(20,20') are formed under the first to third ribbons(30,40,50), respectively, and generate an electrostatic force by an externally applied voltage. A support(60) is formed to support the ribbons(30,40,50), so that the first to third ribbons(30,40,50) are formed over the substrate(10). The planar electrodes(20,20') are formed under the first ribbon(40) and at lower parts of both ends of each of the first and third ribbons(30,50).
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