发明名称
摘要 <p>An interlayer dielectric film is made from an organic/inorganic hybrid film. The organic/inorganic hybrid film has a main chain in which a first site of siloxane and a second site of an organic molecule are alternately bonded to each other.</p>
申请公布号 JP3505520(B2) 申请公布日期 2004.03.08
申请号 JP20010141055 申请日期 2001.05.11
申请人 发明人
分类号 C08G77/42;C08G77/50;H01L21/312;H01L21/314;H01L21/316;H01L21/768;H01L23/522;(IPC1-7):H01L21/312 主分类号 C08G77/42
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