| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple manufacturing method of a spacer capable of forming a part with relatively low electric resistance for preventing electrification of the surface area of the spacer with good controllability, and to provide the spacer. SOLUTION: The manufacturing method of the spacer comprises a process of forming a spacer base body made of glass material of which at least a part of the surface area contains PbO by 40 wt.% or more, and a process of lowering the resistance of at least a part of the surface area by deoxidizing the spacer base body. The conductivity of the surface of the spacer can be easily controlled only by changing at least one condition out of the setting of the amount of PbO contained in the glass material, the temperature and the period of deoxidization, and the hydrogen density of the deoxidizing atmosphere. COPYRIGHT: (C)2004,JPO
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