| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique which sets a proper inspection region and which can execute inspection. <P>SOLUTION: A reference inspection region RIF including a bonding pad region BPr and a base region BAr is set, with respect to a reference substrate. A reference substrate, binarized image RBM in the reference inspection region RIF, is generated. A similar process is performed for an inspection substrate, in which an individual inspection region IIF, including a bonding pad region BPr and a base region BAr is set, and in which an inspection substrate binarized image TBM is generated. An inspection executing region IEF is obtained, by the logical product of the reference inspection region RIF and the individual inspection region IIF. An inspection result TR is obtained by the comparison between two kinds of binarized images RBM and TBM, in the inspection executing region IEF. <P>COPYRIGHT: (C)2004,JPO |
