| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate detecting device with high precision by which a state of storing substrates in FOUP is detected accurately. SOLUTION: A substrate detecting device 1 comprises an opening 11c, from which substrates W are inserted and taken out, and detects the substrates W stored in a substrate storage 11 having grooves 11d in two or more stages, the grooves 11d being provided for storing and holding the inserted plurality of substrates W substantially in a horizontal direction. The device comprises a plurality of receivers 52 which are attached to a member 59 opposed to the opening 11c and are arranged in series along the height direciton of the substrate storage 11 and a transmitter 51 which is set movably along the longitudinal direction of the substrate storage 11 and transmits a signal to the substrates W stored in the grooves 11d of the substrate storage 11. The signal transmitted from the transmitter 51 is received by the receiver 52, so that it is possible to detect the presence or absence and the state of the substrates W stored in the grooves 11d of the substrate storage 11. COPYRIGHT: (C)2004,JPO |
