SEMICONDUCTOR OPTICAL ELEMENT AND METHOD FOR MANUFACTURING SAME

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor optical element formed with the core layer of an optical waveguide being a window area in the neighborhood of the incident/outgoing edge face of light and a method for manufacturing it. SOLUTION: This semiconductor optical element where an incident/outgoing edge face 8 of the light is formed by etching or cleavage is provided with a semiconductor substrate 1 and an active layer 2 arranged on the semiconductor substrate configuring an optical waveguide and a core layer 9 acting as a window area arranged between the active layer 2 and the edge face 8 on the semiconductor substrate, and constituted of the oxide of a compound semiconductor containing aluminum whose length is 5μm to 20μm. COPYRIGHT: (C)2004,JPO