发明名称 LAYOUT DATA SAVING METHOD, LAYOUT DATA CONVERSION DEVICE AND FIGURE INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a layout data saving method and the like that are structured to relatively easily check overall influences of a change or the like in a figure defined by basic element data. SOLUTION: Layout data are saved to define a reverse hierarchical structure in which lower cell data (or basic element data) have parent cell information showing upper cell data that refer to them direct. Specifically, basis element data figD1 and figD2 both have cell data cell2 as parent cell information, basis element data figD3 to figD5 all have cell data cell3 as parent cell information, the cell data cell3 have two identical cell data cell2 as parent cell information, and the cell data cell2 have three identical cell data cell3 as parent cell information. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004070626(A) 申请公布日期 2004.03.04
申请号 JP20020228353 申请日期 2002.08.06
申请人 RENESAS TECHNOLOGY CORP 发明人 KAMON KAZUYA
分类号 G06F17/50;H01L21/82;(IPC1-7):G06F17/50 主分类号 G06F17/50
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