| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing device for a laminated substrate which decreases manufacture failure of laminated substrates. SOLUTION: The chamber 32 of a pressing device 17 is provided with a pressurizing plate 33a and a table 33b opposing to each other to hold substrates W2, W1. The pressurizing plate 33a is supported as hooked by a second supporting plate 26 through a column 34. The table 33b is supported by a positioning stage 36 through a column 37. The upper vessel 32a of the chamber 32 is supported as hooked by the second supporting plate 26 through a bellows 35 surrounding the column 34, while the lower vessel 32b is supported by the positioning stage 36 through a bellows 38 surrounding the column 37. The second supporting plate 26 and the positioning stage 36 are supported by a base plate 21 and a supporting frame 22 having high rigidity, respectively. COPYRIGHT: (C)2004,JPO
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