发明名称 |
Humidity sensor and fabrication method thereof |
摘要 |
A humidity sensor and fabrication method thereof. In the humidity sensor of the present invention, two comb-type electrodes with a plurality of teeth are disposed on a semiconductor substrate. A SiO2 sensing film is disposed between the teeth of the two comb-type electrodes on the substrate. A predetermined voltage is applied between the two comb-type electrodes, a leakage current between the two electrodes is detected, and the humidity in the environment is measured according thereto.
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申请公布号 |
US2004040378(A1) |
申请公布日期 |
2004.03.04 |
申请号 |
US20030440934 |
申请日期 |
2003.05.19 |
申请人 |
NANYA TECHNOLOGY CORPORATION |
发明人 |
CHEN CHIH-KUN;KUNG YAO-HSIUNG;LIN CHUNG-MIN;TSAI HSIN-CHUAN |
分类号 |
G01N27/12;(IPC1-7):G01N1/00;G01N19/00 |
主分类号 |
G01N27/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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