METHOD FOR PROCESSING DATA BASED ON THE DATA CONTEXT

摘要

A method for managing collected data in a semiconductor processing environment. The collected data can include: raw data collected during a process, trace file data received during a process, and process log file data received during a process. The raw data is synchronized with the trace file data and process log file data to create wafer data and summary data, and a file is created containing the wafer data and the summary data.