MICRO-MACHINE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a micro-machine for a high frequency filter having a high Q value and a higher frequency band. SOLUTION: This micro-machine 20 includes an output electrode 7 placed on a substrate 1, a layer insulation film consisting of a first insulation film 9 and a second insulation film 11 placed on the substrate 1 in a manner to cover the electrode 7, a hole pattern 11a placed on the second insulation film 11 in a manner to reach the electrode 7 and a strip-like oscillator electrode 15 placed on the second insulation film 11 so that the electrode 15 crosses over a space portion A within the hole pattern 11a. COPYRIGHT: (C)2004,JPO