| 摘要 |
Methods and apparatus for collecting heat within a precision stage system substantially without introducing significant disturbance forces to the system are disclosed. According to one aspect of the present invention, a method for substantially removing heat from a first location within an overall stage apparatus includes providing the heat from the first location to a heat transferring mechanism that carries the heat away from the first location. The heat is transferred from the heat transferring mechanism to a second location associated within the stage apparatus. The second location includes a material that is arranged to store the transferred heat. The method also includes storing the heat substantially within the material. In one embodiment, the heat is generated at the first location.
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