发明名称 Transfer method
摘要 A rail-guided transfer system, capable of preventing the reduction of the operation rate of manufacturing equipments on a manufacturing line such as a semiconductor manufacturing line etc., is provided. Two RGVs 11A and 11B are arranged in advance on one transfer rail 3 laid between two stockers BS1 and BS2. For example, when maintenance of the manufacturing equipment EQ8 provided between the stockers BS1 and BS2 is done, a transfer region MA1 of the RGV 11A is set from the stocker BS1 to the manufacturing equipment EQ7 and a transfer region MA2 of the RGV 11B is set from the stocker BS2 to the manufacturing equipment EQ9.
申请公布号 US2004042878(A1) 申请公布日期 2004.03.04
申请号 US20030641057 申请日期 2003.08.15
申请人 WATANABE SHINICHI;KOBAYASHI YOSHIAKI;WAKABAYASHI TAKAYUKI 发明人 WATANABE SHINICHI;KOBAYASHI YOSHIAKI;WAKABAYASHI TAKAYUKI
分类号 H01L21/68;H01L21/00;H01L21/677;(IPC1-7):B65H1/00 主分类号 H01L21/68
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