| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oxide laminate which is excellent in mechanical characteristics such as bending. <P>SOLUTION: The oxide laminate has at least one oxide layer on a substrate and has an absorption intensity ratio LO/TO within a range of 0.2-0.8 obtained by infrared absorption spectral measurement in at least one oxide layer, wherein LO/TO means a ratio of LO (Longitudinal optical) mode to TO (transverse Optical) mode in absorption attributed to -M-O-M- bond (M is at least one kind of an element selected from the group of silicon, zirconium, titanium, tungsten, tantalum, aluminum, zinc, indium, chromium, vanadium, niobium and tin). <P>COPYRIGHT: (C)2004,JPO |
