LASER MACHINING APPARATUS, MACHINING METHOD, AND METHOD OF MANUFACTURING CIRCUIT BOARD USING THIS MACHINING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser machining apparatus for machining such as drilling a ceramic green sheet or the like by using a laser beam efficiently.

SOLUTION: A plurality of optical path systems are provided between a laser oscillator 1 in the laser machining apparatus and an irradiation position control optical system for irradiating a prescribed position on a work with a laser beam. The plurality of optical path systems 30, 40, i.e. the optical path system 30 for guiding a laser beam to the irradiation position control optical system without changing a cross-sectional shape in a direction perpendicular to an optical axis of the laser beam emitted from the laser oscillator, and the optical system 40 for guiding the laser beam while changing the cross-sectional shape are arranged. These optical path systems are differently used as required, depending on a machining state.

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