| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method which improves processing performance by accelerating disposal of removed material in machining from a workpiece. <P>SOLUTION: An ultrashort pulse laser beam L is irradiated to the workpiece 2 from one side (front surface 2a) of it , through which the ultrashort pulse laser beam is transmitted. The irradiated ultrashort pulse laser beam L is transmitted through the one side (front surface 2a) of the workpiece 2, then converged on the other side (rear surface 2b) and machines the workpiece 2 from the surface or the proximity of the surface on the other side (rear surface 2b). <P>COPYRIGHT: (C)2004,JPO</p> |
