| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum chuck that can machine a work by milling without damaging an upper plate surface of the vacuum chuck, dispense with a preparation before suction by a vacuum chuck, always maintain a constant vacuum pressure and allow the use of cutting oil at the machining. SOLUTION: A plurality of suckers 20 are distributed on an upper surface of a base member 12 of the vacuum chuck 10. A work W is put on these suckers and a specified space S is formed between the work W and the base member 12. The work is sucked tightly by applying negative pressure through a plurality of sucking holes 21 of the suckers. For this chucking, a silicone rubber of the sucker ensures sealing. Under this suction state, a work is machined by milling. There is no risk to damage the upper surface of the base member even if a drill top penetrates through the work and this process can be carried out in a single step. COPYRIGHT: (C)2004,JPO
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