| 摘要 |
PROBLEM TO BE SOLVED: To reduce the power consumption of a vacuum pump while inhibiting the lowering of the vacuum in an exhaust pipe. SOLUTION: A rotation control device 3 increases a rotating frequency of the vacuum pump 2 when it receives a start signal S1 of the processing done in a processing device 1, decreases the rotating frequency of the vacuum pump 2 when it receives a termination signal S2 of the processing done in the processing device 1, and further increases the rotating frequency of the vacuum pump 2 when the vacuum in the exhaust pipe 4 becomes less than a predetermined value P1. COPYRIGHT: (C)2004,JPO
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