SUBSTRATE CONVEYANCE APPARATUS, PARTS MOUNT APPARATUS, AND CONVEYANCE BELT REPLACEMENT METHOD FOR THIS SUBSTRATE CONVEYANCE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate conveyance apparatus capable of facilitating replacement of a conveyance belt while simplifying a structure for substrate conveyance, a parts mount apparatus, and a conveyance belt replacement method for the substrate conveyance apparatus.

SOLUTION: This substrate conveyance apparatus is provided with a drive shaft 20 which is connected with a single rotation drive source 35 and drives each of driving pulleys 14A, 14B of a pair of conveyer rails 11A, 11B on its coaxial line. The drive shaft 20 includes at least a pair of parted shaft ends of which the parts are parted in the axial direction; and a shaft coupling 26 for freely parting the parting shaft end and connecting the shaft end. The conveyance belts 13A, 13B are designed so as to be detachable from a parted section 23 at the time of parting the shaft coupling 26.

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