| 摘要 |
PROBLEM TO BE SOLVED: To shorten cycle time for storing or discharging thin plate-shaped material. SOLUTION: The cassette supply position where the cassette is supplied, the storage (discharge) position which stores the thin plate-shaped material in the cassette and discharges it from the cassette, and the cassette restoring position where the restoring of the cassette is performed, are independently arranged. The device is equipped with a cassette moving means which performs the cassette movement between the cassette supply position, the thin plate-shaped material storage (discharge) position, and the cassette restoring position, and a thin plate-shaped material storage (discharge) means which stores (discharges) the thin plate-shaped material in the thin plate-shaped material storage (discharge) position. COPYRIGHT: (C)2004,JPO
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