| 摘要 |
The invention relates to a micromechanical component, especially an acceleration sensor, comprising a substrate, at least one seismic mass, whereby the first end of the spring device is connected to the substate and the second end is connected to the mass. The stiffness (spring constant) of the spring device is such that a movement of the mass relative to the substrate can occur as a result of an acceleration relative to the substrate, especially parallel to a surface of said substrate. |
