发明名称 PLATE CAPACITOR IN AN INSULATING TRENCH
摘要 The invention relates to a semiconductor component comprising a substrate (1) and an insulation trench (10) which is provided in the substrate (1) and which is partially filled with an insulating material (5). A plate capacitor (40; 45; 50) is embedded in said insulating material (5). The invention also relates to a corresponding production method.
申请公布号 WO0197261(A3) 申请公布日期 2004.03.04
申请号 WO2001EP06283 申请日期 2001.06.01
申请人 INFINEON TECHNOLOGIES AG;HEINECK, LARS-PETER;SECK, MARTIN;JACOBS, TOBIAS 发明人 HEINECK, LARS-PETER;SECK, MARTIN;JACOBS, TOBIAS
分类号 H01L21/02;H01L21/762;H01L27/08 主分类号 H01L21/02
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