DISASTER PREVENTION EQUIPMENT OF SUBSTANCE FEEDER

摘要

PROBLEM TO BE SOLVED: To provide disaster prevention equipment for a substance feeder that can prevent a fire due to a dangerous substance in a protective enclosure wall, namely that provides effective disaster prevention equipment by detecting the leakage of the substance in the protective enclosure wall and blocking a feeding route of the substance and treating with a catalyst by forcefully discharging the leaking substance from the protective enclosure wall. SOLUTION: The substance feeding route 3 is blocked and then the leaked substance is discharged from the protective enclosure wall 6 and treated with the catalyst when the leakage of the substance is detected in the protective enclosure wall 6 of the substance feeder to feed a pyrophoric substance or a water-prohibitive substance to semiconductor manufacturing equipment 2 from a substance storage tank 1 in the protective enclosure wall 6. COPYRIGHT: (C)2004,JPO