发明名称 |
Optical multilayer film and optical semiconductor device including the same |
摘要 |
An optical multilayer film includes: a first layer; a second layer that contains titanium oxynitride as a main component; and a third layer that contains magnesium fluoride as a main component; the first layer that has a different refractive index from that of the second layer or the third layer; and the first layer, the second layer, and the third layer being part of a laminated structure that includes a plurality of reflection planes. The thickness of the third layer is smaller than ¼ wavelength.
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申请公布号 |
US2004043259(A1) |
申请公布日期 |
2004.03.04 |
申请号 |
US20030648356 |
申请日期 |
2003.08.27 |
申请人 |
FUJITSU QUANTUM DEVICES LIMITED |
发明人 |
OKADA NOBUMASA;HIRAIKE TADAHIRO |
分类号 |
B32B7/02;B32B9/00;C23C14/48;G02B1/11;H01S5/028;(IPC1-7):B32B9/00 |
主分类号 |
B32B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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