| 摘要 |
A common electrode formed on the lowest piezoelectric sheet has a shape corresponding to drive electrodes, and lead-out parts of the common electrode have a shape corresponding to projecting parts of the drive electrodes. Because the common electrode formed on the lowest piezoelectric sheet is made large enough to include the projected contours in the horizontal plane of the drive electrodes together with their lead-out parts, the common electrode lies between the cavity plate and the drive electrodes nearest to the cavity plate. Therefore, the voltage applied to the drive electrode is restricted from leaking to the cavity plate.
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