| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a component for a glassy carbon CVD device that can suppress the occurrence of impurities such as particles or the like due to peeling of CVD deposits by improving adhesiveness between the surface of the component and the CVD deposits and increasing a film thickness wherein cracking starts on the surface of a film formed by the CVD deposits and can prevent the generation of dust from itself, and to provide its manufacturing method. <P>SOLUTION: In the component for glassy carbon CVD device, when observing a field of view of 50μm×50μm on its surface by a scanning electron microscope, at least five holes of 1-10μ in diameter exist, or the total length of a linear hole of 0.5-5μm in width is at least 50μm in the field of view. The component therefor is manufactured by mechanical surface roughening treatment and chemical surface erosion treatment. <P>COPYRIGHT: (C)2004,JPO |
