摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow sensor which detects a flow rate of fluid with high precision. <P>SOLUTION: A substrate is placed in a flow channel, and a plurality of transducers are placed on the substrate. The transducers are configured to respond to the fluid flow, by modifying the signals in relation to the flow. These transducers are arranged, with at least one of the transducers being disposed closer to the central longitudinal axis of the flow channel than at the other transducer. A signal processor calculates the flow rate of the fluid as a function of at least these two signals. <P>COPYRIGHT: (C)2004,JPO</p> |