| 摘要 |
PROBLEM TO BE SOLVED: To provide a purification method of a hydrogen peroxide solution to efficiently obtain a high purity hydrogen peroxide solution. SOLUTION: The hydrogen peroxide solution is treated with a porous ceramic filter (preferably a hollow-type filter) having≤5μm average particle size, preferably 0.004 to 0.2μm. Preferably, the method further includes a process of treating the hydrogen peroxide solution with an ion exchange resin. Or, preferably the method includes a process of cleaning the porous ceramic filter with a water-soluble organic solvent and/or an inorganic acid. COPYRIGHT: (C)2004,JPO
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