METHOD OF MANUFACTURING LIGHT-EMITTING DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce or eliminate the occurrence of various faulty modes (such as shrinks and dark spots) in light-emitting elements having organic compounds. SOLUTION: A method includes suppressing a nonlight-emitting region, right after the light-emitting element is made, by making a partition wall 111 have a curved surface of a curvature radius at the upper end or the lower end thereof; rinsing the surface of a positive electrode 110 with a porous sponge to remove fine particles scattered on the positive electrode surface; and suppressing the occurrence of shrink both by heating under an inert atmosphere and by heating in a vacuum, to remove adsorbed water from throughout a substrate having TFTs and the partition walls, immediately before a layer containing the organic compound 112 is formed. COPYRIGHT: (C)2004,JPO