GAS SUPPLY SYSTEM AND TREATMENT SYSTEM

摘要

A treatment system capable of supplying a raw material gas produced in a material storage vessel into a treatment apparatus substantially without causing a pressure loss. A treatment system has a treatment apparatus (22) with gas jetting means (42) for jetting a predetermined raw material gas, with low vapor pressure and formed of a metallic compound material (M), in a treatment container (26) to apply a predetermined treatment to an object (W) to be treated, and a gas supply system (24) for supplying the predetermined raw material gas to the gas jetting means. The gas jetting means is a shower head portion, and the gas supply system has a gas passage (56) extending upward from the shower head portion, a material storage vessel (58) installed on the upper end portion of the gas passage and receiving the metallic compound material in its inside, and an open/close valve (60) for opening and closing the gas passage.