| 摘要 |
PROBLEM TO BE SOLVED: To provide a moire processing method for excluding moire effect and calculating an amplitude value closer to a true value. SOLUTION: The moire processing method has a first step of finding a period of moire occurred with respect to a measurement result of a periodic pattern where the moire occurs, a second step of separating data in an interval equal to or more than the period found on the first step and finding maximum/minimum values in each separated region, a third step of averaging the maximum/minimum values found on the second step, and a fourth step of making a difference between the average values of the maximum/minimum values found on the third step be the amplitude value. COPYRIGHT: (C)2004,JPO
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