发明名称 CONDUCTIVE PATH OR ELECTRODE AND METHOD FOR FORMING THOSE
摘要 PROBLEM TO BE SOLVED: To provide a method for forming a conductive path and an electrode which is simple and has high a resolution, high position precision, and high manufacturing efficiency. SOLUTION: The method for forming the conductive path or electrode includes a process of forming on a base an abrasion layer containing a photosensitive resin and a conductive polymer layer containing a conductive polymer in this order, a process of exposing the abrasion layer to an energy beam of high density, and a removing process of peeling and removing the conductive polymer layer corresponding to the exposed part of the abrasion layer together with the exposed part. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004071936(A) 申请公布日期 2004.03.04
申请号 JP20020231169 申请日期 2002.08.08
申请人 KONICA MINOLTA HOLDINGS INC 发明人 HIRAI KATSURA
分类号 H01L21/28;H01L21/3205;H01L21/336;H01L29/786;H01L51/00;H01L51/05;H01L51/40;H05K3/00;H05K3/02;(IPC1-7):H01L21/320 主分类号 H01L21/28
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