| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical dimension measuring apparatus for improving the accuracy for measuring a dimension of a heated wire, while heating and carrying the wire such as a hot wire, a warm wire, etc. SOLUTION: The optical dimension measuring apparatus A is provided with a through-hole 31 disposed in the center of a plate and passing the heating wire W, such as the hot wire, the warm wire, etc. through and a measuring part, comprising a light-emitting part 32 and a light-receiving part 33 disposed opposite through the through-hole 31. The light-emitting part 32 is a light source, having a reduced fluctuation of luminescence intensity and low coherence, such as a light emitting diode 32a. In the apparatus A, dimension measurement for the heating wire W, such as hot wire, warm wire, etc. can be implemented accurately, without the influence of refraction distribution, existing around the heating wire W, such as hot wire, warm wire, etc. COPYRIGHT: (C)2004,JPO
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