发明名称 Semiconductor device and method of manufacturing the same
摘要 There a provided a first insulating layer formed over a semiconductor substrate, a cell plate line formed on the first insulating layer and having a slit that divides a region except a contact area into both sides, a capacitor dielectric layer formed on the cell plate on both sides of the slit and having a clearance over the slit, and a plurality of capacitor upper electrodes formed on the capacitor dielectric layer in one column on both sides of the slit.
申请公布号 US2004041193(A1) 申请公布日期 2004.03.04
申请号 US20030424712 申请日期 2003.04.29
申请人 FUJITSU LIMITED 发明人 KOMURO GENICHI
分类号 H01L27/105;H01L21/02;H01L21/822;H01L21/8246;H01L27/04;H01L27/10;H01L27/108;H01L27/115;H01L29/04;(IPC1-7):H01L27/108 主分类号 H01L27/105
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