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发明名称
Vorrichtung für die Reduktion von durch die thermische Ausdehnung in einem Substrat verursachten Grenzflächenspannungen
摘要
申请公布号
DE10034309(B4)
申请公布日期
2004.03.04
申请号
DE2000134309
申请日期
2000.07.14
申请人
AGILENT TECHNOLOGIES, INC. (N.D.GES.D.STAATES DELAWARE)
发明人
DAUKSHER, WALTER J.;ENGEL, PEDRO F.
分类号
H05K1/18;H01L21/60;H01L23/00;H01L23/36;H01L23/50;(IPC1-7):H05K3/32
主分类号
H05K1/18
代理机构
代理人
主权项
地址
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