FILM FORMING METHOD, FILM FORMING APPARATUS, AND DEVICE PRODUCTION METHOD, DEVICE PRODUCTION EQUIPMENT

摘要

PURPOSE: To improve the throughput during preliminary ejection for film formation on a color filter substrate of a liquid display device. CONSTITUTION: The film forming method includes a preliminary ejection process for preliminarily ejecting droplets from a head 21 and a droplet ejection process for moving the head 21 and a work W relatively to each other and ejecting droplets on a surface of the work W from the head 21. Droplets are preliminarily ejected while the head 21 and the work W are moving relatively to each other.