| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection device and method thereof, which can enhance a unevenness area, depending on a background of imaging data and a shape and size of unevenness, and stably accurately perform an unevenness inspection. <P>SOLUTION: A first area pattern extraction part 58 sequentially extracts the image brightness data of a center area prescribed by a first area pattern from the upper left of two dimensional image data, and computes a center area average brightness value that is the average of a brightness value of the extracted image brightness data. Also, a second area pattern extracting part 59 for sequentially extracts the image brightness data of a peripheral area prescribed by a second area pattern from the upper left of two dimensional image data, and computes a peripheral area average brightness value that is an average of a brightness value of the extracted image brightness data. A difference computation part 60 computes the difference value between the center area average brightness value and the peripheral area average brightness value, and creates image data enhanced in the unevenness. <P>COPYRIGHT: (C)2004,JPO |
