| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microwave power supply system of which damages to a dummy load or the like can be prevented appropriately by utilizing permissible power characteristic of the dummy load. <P>SOLUTION: A microwave power supply system comprising a magnetron 1 to supply the microwave power to a load, an anode power source part 2 to supply power of power supply to the magnetron 1, and the dummy load 5 to absorb reflected electric power reflected by the load is equipped with a reflected wave electric power detector 6 to detect the reflected wave electric power reflected by the load and to output the signal corresponding to the detected electric power, a charge-discharge circuit 32 generating and outputting a signal obtained by integrating the reflected microwave power over the time by using a signal outputted from the reflected wave electric power detector 6, a shut-down circuit 12 shutting down the power source supplied from the anode power source part 2 to the magnetron 1, and a comparator circuit 34 and a shut-down signal output circuit 36 outputting a shut-down signal to the shut-down circuit 12 based on the signal outputted from the charge-discharge circuit 32. <P>COPYRIGHT: (C)2004,JPO |
