| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser cutting method and apparatus which can provide a desired irradiation shape and intensity distribution of a cutting irradiation beam by a simple constitution. <P>SOLUTION: In this method, cracks 30, 31 formed in a cutting origin of a substrate 3 are directed along a predetermined cutting line 40 by utilizing thermal stress created upon laser beam irradiation to cut the substrate 3. An incident beam 10 is diffracted by a diffraction optical element 2 to generate an irradiation beam 20 having predetermined irradiation shape and strength distribution. The substrate 3 is irradiated with the generated irradiation beam 20. One example of the irradiation beam 20 is a strip beam having substantially uniform intensity distribution along the predetermined cutting line 40. <P>COPYRIGHT: (C)2004,JPO</p> |
