ILLUMINATION APPARATUS, PHASE PLATE, INSPECTION METHOD, INSPECTION APPARATUS AND METHOD FOR MANUFACTURING MASK

摘要

PROBLEM TO BE SOLVED: To provide an illumination apparatus and a phase plate to uniformly illuminate the object for inspection with laser light, and to provide an inspection apparatus, an inspection method and a method for manufacturing a mask by using the illumination apparatus and the phase plate.

SOLUTION: A rotating plate 2 rotating at a specified rotation with the output side face tilted from the optical axis is disposed in front of the laser light source 1 on the optical axis. A fixed phase plate 3 is disposed in front of the rotation plate 2, and further a condenser lens 5 is disposed in front of the fixed phase plate 3.

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