EQUIPMENT SECURING THIN AND FLEXIBLE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide equipment or a chuck securing a thin and/or flexible substrate, and thereby sucking the substrate uniformly over the entire surface without a defect such as a warp or a bend. SOLUTION: The chuck 1 includes a notch 4 and a hole 5 communicating with a plurality of fine grooves 7 disposed on a support face 2. When a vacuum unit 6 sucks air through the notch 4 and the hole 5, the vacuum is extended to the fine grooves 7, for sucking the substrate 3 placed on the support face 2. COPYRIGHT: (C)2004,JPO