,申请号JP20020520285-传众专利搜索

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发明名称
摘要
申请公布号	JP2004507086(A)	申请公布日期	2004.03.04
申请号	JP20020520285	申请日期	2001.08.13
申请人		发明人
分类号	G03F7/42;H01L21/027;H01L21/3065;H01L21/308;H01L21/76;(IPC1-7):H01L21/306	主分类号	G03F7/42
代理机构		代理人
主权项
地址

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