Method of forming chalcogenide sputter target

摘要

A method of fabricating a glass containing target for sputter deposition of a glass onto a substrate. The method includes synthesizing a glass from pure chemical element materials and then forming the synthesized glass into a powder, which is then used to form a glass containing target. In accordance with one aspect of the invention, the glass containing target may be used for sputter deposition of a thin coating of glass on a substrate. In exemplary embodiments, the glass is a chalcogenide glass target useful in fabricating memory devices.