| 摘要 |
PROBLEM TO BE SOLVED: To detect minute recess/protrusion shape in a rough surface, which has been impossible with an optical surface inspection apparatus. SOLUTION: The surface inspection apparatus comprises a microwave generator, a first optical system that guides microwaves to a surface to be measured, a microwave detector that detects the reflected waves from the surface to be measured, a second optical system that guides the reflected waves to the microwave detector, a signal processor which acquires a signal intensity distribution by processing the detection signal for each measuring point and decides the surface shape of the metal, based on the acquired signal intensity distribution, and a movement mechanism for an object to be measured. COPYRIGHT: (C)2004,JPO
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